Area-Selective Atomic Layer Deposition of Crystalline BaTiO3

Document Details

Document Type
Pub Defense Publication
Publication Date
Jul 11, 2019
Source ID
10.1021/acs.chemmater.9b01271

Entities

People

  • Brennan M. Coffey
  • Edward L. Lin
  • John G Ekerdt
  • Pei-yu Chen

Organizations

  • Air Force Office of Scientific Research
  • Division of Engineering Education & Centers
  • Division of Graduate Education
  • University of Texas at Austin