Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 13, 2020
Source ID
10.1021/acs.chemmater.9b03926

Entities

People

  • Andrew C. Lang
  • Andrew D. Koehler
  • Charles. R. Eddy Jr.
  • David J. Meyer
  • David R. Boris
  • Geoffrey M. Foster
  • Luke O. Nyakiti
  • Neeraj Nepal
  • S. B. Qadri
  • Scott G. Walton
  • Virginia D. Wheeler

Organizations

  • American Society for Engineering Education
  • Office of Naval Research Global
  • Texas A&M University
  • United States Naval Research Laboratory