Speciation of CuCl and CuCl2 Thiol-Amine Solutions and Characterization of Resulting Films: Implications for Semiconductor Device Fabrication

Document Details

Document Type
Pub Defense Publication
Publication Date
Nov 13, 2017
Source ID
10.1021/acs.inorgchem.7b01359

Entities

People

  • Caleb K. Miskin
  • Evan C. Wegener
  • Hilkka Kenttämaa
  • Jeffrey T Miller
  • Laurance T. Cain
  • Priya Murria
  • Rakesh Agrawal
  • Ravikiran Yerabolu
  • Robert Boyne
  • Ruihong Zhang

Organizations

  • Division of Graduate Education
  • Division of Materials Research
  • Office of Naval Research
  • Purdue University

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene