First-Principles Study on Electron-Induced Excitations of Atomic Layer Deposition Precursors: Inelastic Electron Wave Packet Scattering with Cobalt Tricarbonyl Nitrosyl Co(CO)3NO Using Time-Dependent Density Functional Theory

Document Details

Document Type
Pub Defense Publication
Publication Date
May 21, 2021
Source ID
10.1021/acs.jpca.0c11309

Entities

People

  • Davide Ceresoli
  • Kyeongjae Cho
  • Xiaolong Yao
  • Yeonghun Lee

Organizations

  • Defense Advanced Research Projects Agency
  • National Research Foundation of Korea
  • University of Texas at Dallas

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene