First-Principles Study on Electron-Induced Excitations of Atomic Layer Deposition Precursors: Inelastic Electron Wave Packet Scattering with Cobalt Tricarbonyl Nitrosyl Co(CO)3NO Using Time-Dependent Density Functional Theory
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- May 21, 2021
- Source ID
- 10.1021/acs.jpca.0c11309
Entities
People
- Davide Ceresoli
- Kyeongjae Cho
- Xiaolong Yao
- Yeonghun Lee
Organizations
- Defense Advanced Research Projects Agency
- National Research Foundation of Korea
- University of Texas at Dallas