Nanoscale Structural and Chemical Properties of Ferroelectric Aluminum Scandium Nitride Thin Films

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 24, 2021
Source ID
10.1021/acs.jpcc.1c01523

Entities

People

  • Alexandre C Foucher
  • Andrew C Meng
  • Dixiong Wang
  • Eric Stach
  • Jeffery Zheng
  • Pariasadat Musavigharavi
  • Roy H. Olsson Iii

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation
  • Office of Basic Energy Sciences
  • Semiconductor Research Corporation
  • University of Pennsylvania