Development and Applications of ReaxFF Reactive Force Fields for Group-III Gas-Phase Precursors and Surface Reactions with Graphene in Metal–Organic Chemical Vapor Deposition Synthesis

Document Details

Document Type
Pub Defense Publication
Publication Date
May 06, 2021
Source ID
10.1021/acs.jpcc.1c01965

Entities

People

  • Adri van Duin
  • Joshua A. Robinson
  • Nadire Nayır
  • Qian Mao
  • Siavash Rajabpour

Organizations

  • Air Force Office of Scientific Research
  • Karamanoğlu Mehmetbey University
  • National Science Foundation
  • Pennsylvania State University

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene