Elucidating the Surface Reaction Mechanisms During Atomic Layer Deposition of LixAlySizO by in Situ Fourier Transform Infrared Spectroscopy

Document Details

Document Type
Pub Defense Publication
Publication Date
May 24, 2016
Source ID
10.1021/acs.jpcc.5b09212

Entities

People

  • Jane P. Chang
  • Jea Cho
  • Taeseung Kim
  • Trevor Seegmiller

Organizations

  • Defense Advanced Research Projects Agency
  • Division of Materials Research
  • Office of Naval Research
  • University of California, Los Angeles