Sliding History-Dependent Adhesion of Nanoscale Silicon Contacts Revealed by in Situ Transmission Electron Microscopy

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 09, 2019
Source ID
10.1021/acs.langmuir.9b02029

Entities

People

  • Robert Carpick
  • Rodrigo A Bernal
  • Zachary B Milne

Organizations

  • Air Force Office of Scientific Research
  • Division of Civil, Mechanical & Manufacturing Innovation
  • University of Pennsylvania
  • University of Texas at Austin

Tags

Technology Areas

  • Microelectronics