Bidirectional Self-Folding with Atomic Layer Deposition Nanofilms for Microscale Origami

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 11, 2020
Source ID
10.1021/acs.nanolett.0c00824

Entities

People

  • Baris Bircan
  • David A. Muller
  • Itai Cohen
  • Kyle J Dorsey
  • Marc Z Miskin
  • Michael C. Cao
  • Muhammad G. Salim
  • Paul McEuen
  • Robert J. Lang
  • Wei Wang

Organizations

  • Army Research Office
  • Cornell University
  • Division of Electrical, Communications & Cyber Systems
  • Division of Materials Research