High-Q Nanophotonic Resonators on Diamond Membranes using Templated Atomic Layer Deposition of TiO2
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- May 22, 2020
- Source ID
- 10.1021/acs.nanolett.0c01467
Entities
People
- Alexander A. High
- Amy Butcher
- David Awschalom
- F Joseph Heremans
- Kai Hao
- Nazar Delegan
- Peter J. Duda Iii
- Robert Shreiner
- Xinghan Guo
Organizations
- Air Force Office of Scientific Research
- Argonne National Laboratory
- Boeing
- Defense Advanced Research Projects Agency
- Division of Graduate Education
- Office of Basic Energy Sciences
- University of Chicago