In Situ Observation of Initial Stage in Dielectric Growth and Deposition of Ultrahigh Nucleation Density Dielectric on Two-Dimensional Surfaces

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 28, 2015
Source ID
10.1021/acs.nanolett.5b02429

Entities

People

  • Andrew C Kummel
  • Evgeniy Chagarov
  • Harry Chou
  • Hema C. P. Movva
  • Iljo Kwak
  • Jun Hong Park
  • Kai-ting Hu
  • Kasra Sardashti
  • Pabitra Choudhury
  • Sanjay K. Banerjee
  • Susan K Fullerton-Shirey

Organizations

  • Defense Advanced Research Projects Agency
  • Division of Materials Research
  • New Mexico Institute of Mining and Technology
  • Semiconductor Research Corporation
  • University of Notre Dame
  • University of Texas at Austin