High-Throughput Fabrication of Resonant Metamaterials with Ultrasmall Coaxial Apertures via Atomic Layer Lithography

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 29, 2016
Source ID
10.1021/acs.nanolett.6b00024

Entities

People

  • Daehan Yoo
  • Daniel A. Mohr
  • Jaime Peraire
  • Jonah Shaver
  • Luis Martín-Moreno
  • Ngoc-cuong Nguyen
  • Sang-Hyun Oh
  • Sol Carretero-palacios
  • Thomas W. Ebbesen

Organizations

  • Massachusetts Institute of Technology
  • National Institute of General Medical Sciences
  • Seagate Technology
  • United States Department of Defense
  • University of Minnesota
  • University of Strasbourg

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene