In Situ Thermal Atomic Layer Etching for Sub-5 nm InGaAs Multigate MOSFETs

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 28, 2019
Source ID
10.1021/acs.nanolett.9b01525

Entities

People

  • Andrew S. Cavanagh
  • Jessica A. Murdzek
  • Jesús A. del Alamo
  • Jonas C Gertsch
  • Lisa Kong
  • Steven M. George
  • Wenjie Lu
  • Younghee Lee

Organizations

  • Defense Threat Reduction Agency
  • Division of Chemistry
  • Lam Research
  • Massachusetts Institute of Technology
  • Semiconductor Research Corporation
  • University of Colorado