Adapting the Electron Beam from SEM as a Quantitative Heating Source for Nanoscale Thermal Metrology

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 08, 2020
Source ID
10.1021/acs.nanolett.9b04940

Entities

People

  • Chris Dames
  • D Frank Ogletree
  • Jason Y. Wu
  • Pengyu Yuan
  • Tracy M Mattox
  • Yanbao Ma

Organizations

  • Lawrence Berkeley National Laboratory
  • National Science Foundation
  • Office of Basic Energy Sciences
  • United States Department of Defense
  • University of California

Tags

Technology Areas

  • Directed Energy
  • Microelectronics