Ferroelectric Polarization Switching of Hafnium Zirconium Oxide in a Ferroelectric/Dielectric Stack
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- May 08, 2019
- Source ID
- 10.1021/acsaelm.9b00092
Entities
People
- Mengwei Si
- Peide Ye
- Xiao Lyu
Organizations
- Defense Advanced Research Projects Agency
- Purdue University
- Semiconductor Research Corporation