In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 30, 2020
Source ID
10.1021/acsami.0c01279

Entities

People

  • Alexander C. Kozen
  • Evan R. Glaser
  • Hans Cho
  • Laura B Ruppalt
  • M. E. Twigg
  • Sharka M. Prokes
  • Thomas J. Larrabee
  • Zachary R. Robinson

Organizations

  • American Society for Engineering Education
  • Jacobs Engineering Group
  • Office of Naval Research
  • State University of New York at Brockport
  • United States Naval Research Laboratory