Fabrication of DNA-Templated Pt Nanostructures by Area-Selective Atomic Layer Deposition

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 31, 2022
Source ID
10.1021/acsami.2c02244

Entities

People

  • Chen Chen
  • Haitao Liu
  • Li-Wei Hui
  • Min A Kim

Organizations

  • Office of Naval Research
  • University of Pittsburgh

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene