The Diffusion Mechanism of Ge During Oxidation of Si/SiGe Nanofins

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 16, 2022
Source ID
10.1021/acsami.2c05470

Entities

People

  • Blair Tuttle
  • Chappel Sharrock
  • Emily M. Turner
  • George T. Wang
  • Kevin S. Jones
  • Mark E. Law
  • Sokrates T. Pantelides

Organizations

  • Air Force Research Laboratory
  • Sandia National Laboratories
  • United States Department of Energy
  • University of Florida
  • Vanderbilt University