Self-Rolled-Up Aluminum Nitride-Based 3D Architectures Enabled by Record-High Differential Stress

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 14, 2022
Source ID
10.1021/acsami.2c06637

Entities

People

  • Apratim Khandelwal
  • Chao Li
  • Nitin Choudhary
  • Ping Wang
  • Shunya Namiki
  • Xiuling Li
  • Zetian Mi
  • Zhendong Yang
  • Zhongjie Ren

Organizations

  • Army Research Office
  • National Science Foundation
  • Semiconductor Research Corporation
  • University of Illinois Urbana–Champaign
  • University of Michigan
  • University of Texas at Austin