High Quality Factors in Superlattice Ferroelectric Hf0.5Zr0.5O2 Nanoelectromechanical Resonators
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Aug 03, 2022
- Source ID
- 10.1021/acsami.2c08414
Entities
People
- Nicholas G. Rudawski
- Philip X-L Feng
- Roozbeh Tabrizian
- S.M. Enamul Hoque Yousuf
- Troy Tharpe
- Xu-Qian Zheng
Organizations
- Defense Advanced Research Projects Agency
- Division of Electrical, Communications & Cyber Systems
- University of Florida