Remote Oxygen Scavenging of the Interfacial Oxide Layer in Ferroelectric Hafnium–Zirconium Oxide-Based Metal–Oxide–Semiconductor Structures
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Sep 19, 2022
- Source ID
- 10.1021/acsami.2c11736
Entities
People
- Andrew C Kummel
- Asif Islam Khan
- Chinsung Park
- Hang Chen
- Harish Kumarasubramanian
- Harshil Kashyap
- Jae Hur
- Jayakanth Ravichandran
- Josh Kacher
- Kisung Chae
- Kyeongjae Cho
- Mengkun Tian
- Nashrah Afroze
- Nujhat Tasneem
- Ping-che Lee
- Prabhakar Bandaru
- Sarah Lombardo
- Shimeng Yu
- Winston Chern
Organizations
- Applied Materials
- Defense Advanced Research Projects Agency
- Georgia Tech
- Intelligence Advanced Research Projects Activity
- National Science Foundation
- University of California, San Diego
- University of Southern California
- University of Texas at Dallas