Growth and Characterization of Al2O3 Atomic Layer Deposition Films on sp2-Graphitic Carbon Substrates Using NO2/Trimethylaluminum Pretreatment

Document Details

Document Type: Pub Defense Publication
Publication Date: May 28, 2015
Source ID: 10.1021/acsami.5b02167

Entities

People

Charles Musgrave
Matthias J. Young
Steven M. George

Organizations

Defense Advanced Research Projects Agency
Division of Chemistry
University of Colorado