Inert Gas Enhanced Laser-Assisted Purification of Platinum Electron-Beam-Induced Deposits

Document Details

Document Type
Pub Defense Publication
Publication Date
Jul 14, 2015
Source ID
10.1021/acsami.5b02488

Entities

People

  • Brett B. Lewis
  • Jason D. Fowlkes
  • Joo Hyon Noh
  • Michael G Stanford
  • Philip D. Rack

Organizations

  • Air Force Office of Scientific Research
  • Intel Corporation
  • Office of Science
  • University of Tennessee

Tags

Technology Areas

  • Directed Energy
  • Directed Energy - Lasers
  • Microelectronics