Al2O3 on Black Phosphorus by Atomic Layer Deposition: An in Situ Interface Study

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 08, 2015
Source ID
10.1021/acsami.5b03192

Entities

People

  • Angelica Azcatl
  • Hui Zhu
  • Jiyoung Kim
  • Lanxia Cheng
  • Peide Ye
  • Rafik Addou
  • Robert M Wallace
  • Stephen McDonnell
  • Xiaoye Qin

Organizations

  • Defense Advanced Research Projects Agency
  • Division of Electrical, Communications & Cyber Systems
  • National Institute of Standards and Technology
  • Purdue University
  • Semiconductor Research Corporation
  • University of Texas at Dallas