A Low-Leakage Epitaxial High-κ Gate Oxide for Germanium Metal–Oxide–Semiconductor Devices
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Feb 17, 2016
- Source ID
- 10.1021/acsami.5b10661
Entities
People
- Agham Posadas
- Aiting Jiang
- Alexander A Demkov
- Chengqing Hu
- Edward T. Yu
- John G Ekerdt
- Martin D. Mcdaniel
Organizations
- Air Force Office of Scientific Research
- Cockrell School of Engineering
- Division of Civil, Mechanical & Manufacturing Innovation
- Office of Naval Research
- University of Texas at Austin