Uniform Growth of Sub-5-Nanometer High-κ Dielectrics on MoS2 Using Plasma-Enhanced Atomic Layer Deposition

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 27, 2017
Source ID
10.1021/acsami.7b00538

Entities

People

  • Aaron D. Franklin
  • Damon B. Farmer
  • Felicia A. Mcguire
  • Katherine Price
  • Kirstin Schauble

Organizations

  • Division of Electrical, Communications & Cyber Systems
  • Duke University
  • International Business Machines Corporation (Armonk, NY)
  • Seattle University
  • United States Army Research Laboratory