High-κ Lanthanum Zirconium Oxide Thin Film Dielectrics from Aqueous Solution Precursors

Document Details

Document Type: Pub Defense Publication
Publication Date: Mar 14, 2017
Source ID: 10.1021/acsami.7b00915

Entities

People

Aidan K. Grealish
Alexander C Lygo
Catherine J Page
Keenan N. Woods
Matthew G. Kast
Paul N. Plassmeyer
Shannon W. Boettcher
Tsung-han Chiang

Organizations

Air Force Research Laboratory
Division of Chemistry
M J Murdock Charitable Trust
Oregon State University
University of Oregon
W. M. Keck Foundation