Direct-Liquid-Evaporation Chemical Vapor Deposition of Nanocrystalline Cobalt Metal for Nanoscale Copper Interconnect Encapsulation

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 16, 2017
Source ID
10.1021/acsami.7b01327

Entities

People

  • Jun Feng
  • Roy G. Gordon
  • Xiabing Lou
  • Xian Gong

Organizations

  • Air Force Office of Scientific Research
  • Harvard University
  • Office of Science