Probing the Dielectric Properties of Ultrathin Al/Al2O3/Al Trilayers Fabricated Using in Situ Sputtering and Atomic Layer Deposition

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 12, 2018
Source ID
10.1021/acsami.7b16506

Entities

People

  • Bo Liu
  • Jagaran Acharya
  • Jamie Wilt
  • Judy Z. Wu

Organizations

  • Army Research Office
  • Division of Materials Research
  • University of Kansas