Atomic Layer Epitaxy of Aluminum Nitride: Unraveling the Connection between Hydrogen Plasma and Carbon Contamination
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- May 23, 2018
- Source ID
- 10.1021/acsami.8b04104
Entities
People
- John L. Lyons
- Steven C Erwin
Organizations
- Office of Naval Research
- United States Naval Research Laboratory