Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Feb 01, 2019
- Source ID
- 10.1021/acsami.8b21054
Entities
People
- David B. Heinz
- Fritz B. Prinz
- Hyo Jin K Kim
- J. Provine
- Kirsten E. Kaplan
- Martin M. Winterkorn
- Peter Schindler
- Shicheng Xu
- Thomas W. Kenny
- Timothy S. English
Organizations
- Austrian Science Fund
- Defense Advanced Research Projects Agency