Effect of Al2O3 Seed-Layer on the Dielectric and Electrical Properties of Ultrathin MgO Films Fabricated Using In Situ Atomic Layer Deposition

Document Details

Document Type
Pub Defense Publication
Publication Date
Jul 29, 2019
Source ID
10.1021/acsami.9b05601

Entities

People

  • Devon Romine
  • Jagaran Acharya
  • Judy Z. Wu
  • Ridwan Sakidja
  • Ryan Goul

Organizations

  • Army Research Office
  • Division of Electrical, Communications & Cyber Systems
  • Division of Materials Research
  • Missouri State University
  • University of Kansas