ALD HfO2 Films for Defining Microelectrodes for Electrochemical Sensing and Other Applications

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 24, 2019
Source ID
10.1021/acsami.9b06891

Entities

People

  • Charmaine Chia
  • J. Provine
  • Max M Shulaker
  • Roger T. Howe
  • Stefanie S Jeffrey

Organizations

  • Defense Advanced Research Projects Agency
  • Massachusetts Institute of Technology