Refractive Index Tuning of All-Inorganic TiO2 Nanocrystal-Based Films and High Aspect Ratio Nanostructures Using Atomic Layer Deposition: Implications for High-Throughput Fabrication of Metalenses
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jan 25, 2023
- Source ID
- 10.1021/acsanm.2c04982
Entities
People
- Amir Arbabi
- Andrew McClung
- Dae Eon Jung
- Feyza Dündar Arısoy
- Irene R. Howell
- James J Watkins
- Lucas D. Verrastro
- Vincent Einck
Organizations
- Center for Hierarchical Manufacturing
- Division of Industrial Innovation & Partnerships
- United States Army Research Laboratory
- University of Massachusetts