Atomic Layer Deposition and Patterning of 15–185 nm Thick Al2O3 Films with Microplasma Arrays for Low-Temperature Growth and Sub-300 nm Lateral Feature Resolution

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 08, 2020
Source ID
10.1021/acsanm.9b02453

Entities

People

  • A E Mironov
  • J. G. Eden
  • Jinhong Kim
  • Sung-Jin Park

Organizations

  • Air Force Office of Scientific Research
  • Defense Advanced Research Projects Agency
  • Jet Propulsion Laboratory
  • University of Illinois Urbana–Champaign