One Nanometer Wide Functional Patterns with a Sub-10 Nanometer Pitch Transferred to an Amorphous Elastomeric Material

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 07, 2021
Source ID
10.1021/acsnano.0c08741

Entities

People

  • Anamika Singh
  • Anni Shi
  • Erin N. Lang
  • Jeremiah O. Bechtold
  • Shelley A Claridge
  • Tyson C. Davis

Organizations

  • Defense Advanced Research Projects Agency
  • Purdue University