Simulation-Guided 3D Nanomanufacturing via Focused Electron Beam Induced Deposition

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 17, 2016
Source ID
10.1021/acsnano.6b02108

Entities

People

  • Brett B. Lewis
  • Harald Plank
  • Jason D. Fowlkes
  • Michael G Stanford
  • Philip D. Rack
  • Robert Winkler

Organizations

  • Air Force Office of Scientific Research
  • Austrian Research Promotion Agency
  • European Commission
  • European Cooperation in Science and Technology
  • Federal Ministry for Climate Action, Environment, Energy, Mobility, Innovation and Technology
  • Graz University of Technology
  • University of Tennessee

Tags

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Graphene