Prospects for Thermal Atomic Layer Etching Using Sequential, Self-Limiting Fluorination and Ligand-Exchange Reactions

Document Details

Document Type
Pub Defense Publication
Publication Date
May 24, 2016
Source ID
10.1021/acsnano.6b02991

Entities

People

  • Steven M. George
  • Younghee Lee

Organizations

  • Defense Advanced Research Projects Agency
  • Division of Chemistry
  • Intel Corporation
  • University of Colorado Boulder