Direct Wavelength-Selective Optical and Electron-Beam Lithography of Functional Inorganic Nanomaterials

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 14, 2019
Source ID
10.1021/acsnano.9b05491

Entities

People

  • Dmitri V. Talapin
  • Haoqi Wu
  • Jia-ahn Pan
  • Yuanyuan Wang

Organizations

  • Air Force Office of Scientific Research
  • Argonne National Laboratory
  • Division of Chemistry
  • Division of Materials Research
  • Samsung Group
  • University of Chicago

Tags

Technology Areas

  • Directed Energy
  • Microelectronics