Aluminum Oxide Nanoparticle Films Deposited from a Nonthermal Plasma: Synthesis, Characterization, and Crystallization
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Sep 14, 2020
- Source ID
- 10.1021/acsomega.0c03353
Entities
People
- Harry Atwater
- Himashi P. Andaraarachchi
- Magel Su
- Parker Wray
- Qiaomiao Tu
- Uwe Kortshagen
- Yong Jin Jeong
- Zhaohan Li
Organizations
- Army Research Office
- California Institute of Technology
- University of Minnesota