Tunable Electrical Properties of Vanadium Oxide by Hydrogen-Plasma-Treated Atomic Layer Deposition
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Apr 03, 2017
- Source ID
- 10.1021/acsomega.7b00059
Entities
People
- Helen Hejin Park
- James C. Culbertson
- Laura B Ruppalt
- Sharka M. Prokes
- Thomas J. Larrabee
Organizations
- American Society for Engineering Education
- National Research Council
- Office of Naval Research
- United States Naval Research Laboratory