Scalable Nanoimprint Lithography Process for Manufacturing Visible Metasurfaces Composed of High Aspect Ratio TiO2 Meta-Atoms

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 09, 2021
Source ID
10.1021/acsphotonics.1c00609

Entities

People

  • Amir Arbabi
  • Andrew McClung
  • Dae Eon Jung
  • James J Watkins
  • Mahdad Mansouree
  • Mahsa Torfeh
  • Vincent Einck

Organizations

  • Defense Advanced Research Projects Agency
  • Division of Civil, Mechanical & Manufacturing Innovation
  • United States Army Research Laboratory
  • University of Massachusetts