Pulsed Laser-Assisted Focused Electron-Beam-Induced Etching of Titanium with XeF2: Enhanced Reaction Rate and Precursor Transport
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Feb 10, 2015
- Source ID
- 10.1021/am508443s
Entities
People
- B. B. Lewis
- J. H. Noh
- Jason D. Fowlkes
- M. G. Stanford
- P. D. Rack
- R. Timilsina
Organizations
- Air Force Office of Scientific Research
- Oak Ridge National Laboratory
- United States Department of Energy
- University of Tennessee