Molecular Strategies for Configurational Sulfur Doping of Group IV Semiconductors Grown on Si(100) Using S(MH3)2 (M = Si,Ge) Delivery Sources: An Experimental and Theoretical Inquiry

Document Details

Document Type
Pub Defense Publication
Publication Date
Jul 14, 2014
Source ID
10.1021/cm501434z

Entities

People

  • A. V. G. Chizmeshya
  • C. Senaratne
  • Gordon Grzybowski
  • J. Kouvetakis
  • J. Menéndez
  • R. Favaro

Organizations

  • Air Force Office of Scientific Research
  • Arizona State University
  • Division of Materials Research

Tags

Technology Areas

  • Microelectronics