Mechanistic Study of the Nanoscale Negative-Tone Pattern Transfer from DNA Nanostructures to SiO2

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 17, 2015
Source ID
10.1021/cm5044914

Entities

People

  • Brian Michael
  • Feng Zhou
  • Haitao Liu
  • Karen B. Ricardo
  • Shichao Zhao
  • Sumedh P. Surwade

Organizations

  • Air Force Office of Scientific Research
  • Hangzhou Dianzi University
  • Office of Naval Research
  • University of Pittsburgh

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene