Ultrathin ferroic HfO2–ZrO2 superlattice gate stack for advanced transistors
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Apr 06, 2022
- Source ID
- 10.1038/s41586-022-04425-6
Entities
People
- Apurva Mehta
- Brian Tyrrell
- Cheng-Hsiang Hsu
- Chenming Hu
- Christopher J. Tassone
- Chung-hsun Lin
- Corey Stull
- Costas P Grigoropoulos
- Daewoong Kwon
- David Thompson
- Dominick Pipitone
- Dong Ik Suh
- Dong Jin Jung
- Ghazal Saheli
- Gianni Pinelli
- Jim Ciston
- Jinseong Heo
- John W Freeland
- Jong-Ho Bae
- Jorge Gomez
- Kab-jin Nam
- Li-Chen Wang
- Matthew San Jose
- Matthew T Cook
- Mohamed Mohamed
- Narendra Parihar
- Nirmaan Shanker
- Padraic Shafer
- Patrick Fay
- Ramamoorthy Ramesh
- Ravi Rastogi
- Sayeef Salahuddin
- Seunggeol Nam
- Shang-Lin Hsu
- Souvik Mahapatra
- Steve K. Volkman
- Suman Datta
- Suraj S. Cheema
- Vladimir A. Stoica
- Wenshen Li
- Won-tae Koo
- Woo-bin Song
- Wriddhi Chakraborty
- Yoonsoo Rho
- Yu-Hung Liao
- Zhan Zhang