Millimeter-scale focal length tuning with MEMS-integrated meta-optics employing high-throughput fabrication
Abstract
Miniature varifocal lenses are crucial for many applications requiring compact optical systems. Here, utilizing electro-mechanically actuated 0.5-mm aperture infrared Alvarez meta-optics, we demonstrate 3.1 mm (200 diopters) focal length tuning with an actuation voltage below 40 V. This constitutes the largest focal length tuning in any low-power electro-mechanically actuated meta-optic, enabled by the high energy density in comb-drive actuators producing large displacements at relatively low voltage. The demonstrated device is produced by a novel nanofabrication process that accommodates meta-optics with a larger aperture and has improved alignment between meta-optics via flip-chip bonding. The whole fabrication process is CMOS compatible and amenable to high-throughput manufacturing.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Mar 30, 2022
- Source ID
- 10.1038/s41598-022-09277-8
Entities
People
- Arka Majumdar
- Karl F. Böhringer
- Shane Colburn
- Zheyi Han
Organizations
- Defense Advanced Research Projects Agency