Sensitive pressure sensors based on conductive microstructured air-gap gates and two-dimensional semiconductor transistors

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 24, 2020
Source ID
10.1038/s41928-019-0356-5

Entities

People

  • Chao Ma
  • Chen Wang
  • Cheng-yi Lin
  • Hao Wu
  • Hung-chieh Cheng
  • Qiyuan He
  • Xiangfeng Duan
  • Yu Huang
  • Yuan Liu
  • Yun-chiao Huang

Organizations

  • Office of Emerging Frontiers and Multidisciplinary Activities
  • Office of Naval Research

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems