Scaled indium oxide transistors fabricated using atomic layer deposition

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 21, 2022
Source ID
10.1038/s41928-022-00718-w

Entities

People

  • Haiyan Wang
  • Mengwei Si
  • Peide Ye
  • Xing Sun
  • Zehao Lin
  • Zhizhong Chen

Organizations

  • Semiconductor Research Corporation
  • United States Department of Defense