Nanoelectromechanical resonators for gigahertz frequency control based on hafnia–zirconia–alumina superlattices
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Jul 27, 2023
- Source ID
- 10.1038/s41928-023-00999-9
Entities
People
- Eitan Hershkovitz
- Faysal Hakim
- Honggyu Kim
- Roozbeh Tabrizian
- Troy Tharpe
Organizations
- United States Department of Defense